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Glossary
cryopump
A vacuum pump in which pressure is reduced by condensing gases on surfaces cryogenically cooled to about 20 K (liquid hydrogen) or 4 K (liquid helium).
diffusion pump
A vacuum pump in which heated oil or another substance is forced through jets as a vapor that collides with gas molecules and carries them away from the chamber being evacuated.
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cryopumps
vacuum pumps
fluid handling equipment
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